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Valves for Atomic Layer Deposition
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Item #
6LVV-ALD3FR4-P-C
Item #
6LVV-ALD3FR4-P-C
Series
ALD3
ALD6
ALD7
ALD20
Material
316L VIM/VAR stainless steel
Valves
Modular Surface-Mount Valves
Two-Port Valves
End Connections Inlet/Outlet
Female VCR fitting
Integral male VCR fitting
Rotatable male VCR fitting
Tube butt weld, 0.26 in. long
Tube butt weld, 0.30 in. long
Tube butt weld, 7.6 mm long
End Connections Size
1/4 in.
Actuator
Standard Actuator
Thermal Actuator
Actuation Mode
Normally Closed
Normally Open
Electronic actuator-position sensor
No
Yes
Solenoid pilot valve
No
Yes
Heater cartridge holes
No
Yes
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