Valves for Atomic Layer Deposition On Swagelok Company

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Series	ALD3 ALD6 ALD7 ALD20
Material	316L VIM/VAR stainless steel
Valves	Modular Surface-Mount Valves Two-Port Valves
End Connections Inlet/Outlet
End Connections Size	1/4 in.
Actuator	Standard Actuator Thermal Actuator
Actuation Mode	Normally Closed Normally Open
Electronic actuator-position sensor	No Yes
Solenoid pilot valve	No Yes
Heater cartridge holes	No Yes